例文
- Nano fountain probes ( NFPs ) are fabricated on the wafer-scale using microfabrication techniques allowing for batch fabrication of numerous chips.
- In his work developing similar devices, Nathanson pioneered a method of batch fabrication in which layers of insulators and metal on silicon wafers are shaped and undercut through the use of masks and sacrificial layers, a process that would later become a mainstay of MEMS manufacturing.